PRODUCTS
FREEZER
OEM optical engines for material scribing
Features:
- Robust and reliable industrial grade design
- Built-in sample visualisation, autofocus and vertical objective lens positioning systems
- High versatility - automatic optical power, polarisation and laser focal point configuration adjustment
- Built-in automatic sample surface recognition
- Integrated with ultrafast fs/ps lasers
FREEZER series optical engines feature robust and reliable design that is well optimized for industry. We provide devices that are core parts of industrial scribing stations. FREEZER optical engines are dedicated for crystalline substrate scribing - sapphire, silicon carbide, gallium nitride, lithium niobate, lithium tantalate, quartz and glass. Our main target materials: sapphire, silicon carbide and gallium nitride are widely applied in LED, high power and radio frequency electronics manufacturing industry. We are aiming at integrators and potential customers to work on a mutual project to build industrial scribing stations featuring FREEZER series optical engines. Contact us 
for more information.
| Specifications | Freezer01 | Freezer02 | Freezer03 |
| Sample specifications | |||
| Applied for processing of: | Al2O3, LiNbO3, LiTaO3, quartz, glass | SiC, GaN | |
| Wafer size | Compatible with stations designed for any wafer size | ||
| Optimal wafer thickness, μm | 50-300 | ||
| Applicable for back-coated wafers | Yes | No | Yes |
| Scribing specifications | |||
| Scribing velocity, mm/s | On customer request | ||
| Max. throughput, 4" wafer/h | 91 | 312 | |
| Vertical positioning specifications | |||
| Range, mm | 0.4 | 8 | |
| Resolution, μm | <0.005 | 1.25 | |
| Surface recognition precision, μm | 2 | ||
| Autofocus precision, μm | ±2 | - | |
| Optical specifications | |||
| Number of foci | 1 or 2 | 1, 2, 4 or 8 | |
| Integrated with | DPSS ultrafast laser | ||
| Adjustable laser parameters | Output power, polarisation, focus configuration | ||
| Microscope magnification | x44 | x9.3 | |
1 - for chip size: 0.5 x 0.5 mm, 2 - for chip size: 3 x 3 mm
| General specifications | Freezer01 | Freezer02 | Freezer03 |
| Dimensions, mm | 700x450x450 | 900x450x450 | |
| Weight, kg | 40 | 60 | |
| Operating temperature | 15-30 ºC | ||
| Relative humidity | < 80% (non condensing) | ||
| Power supply | 100-230 VAC, 50/60 Hz, <1kW | ||
| Requirements for sample positioning system | |||
| Process control | Position synchronized output (PSO) | ||